%0 Journal Article
%T A Silicon Microturbopump for a Rankine-Cycle Power-Generation Microsystem—Part II: Fabrication and Characterization
%A Lee, Changgu
%A Liamini, Mokhtar
%A Frechette, Luc G.
%A ,
%J Journal of Microelectromechanical Systems
%V 20
%N 1
%P 326-338
%@ 1057-7157
%D 2011-02-01
%I Institute of Electrical and Electronics Engineers (IEEE)
%~ DeepDyve