%0 Journal Article
%T Energy and signal transmission system for micromechanism using dielectric element
%A Ishihara, Hidenori
%A Fukuda, Toshio
%J Proceedings of SPIE
%V 4194
%N 1
%P 178-183
%@ 0277-786X
%D 2000-10-11
%I SPIE
%~ DeepDyve