%0 Journal Article %T Study on Multidegree-of-Freedom Ultrasonic Motor Using Vibration Mode Rotation of Metal Spherical Stator %A Mizuno, Ai %A Kajiwara, Hidekazu %A Tamura, Hideki %A Aoyagi, Manabu %J Actuators %V 11 %N 1 %@ 2076-0825 %D 2022-01-17 %I Multidisciplinary Digital Publishing Institute %~ DeepDyve