%0 Journal Article
%T Mechanical Study of High Resistance Silicon Carbide Based Multi‐Nano‐Layers Grown by Multifrequency PACVD
%A Rebib, Farida
%A Gaudy, Thomas
%A Soum‐Glaude, Audrey
%A Caron, Isabelle
%A Da Silva, Tony
%A Picard, Christine
%A Cournut, Fabienne
%A Thomas, Laurent
%J Plasma Processes and Polymers
%V 6
%N S1
%P S917-S922
%@ 1612-8850
%D 2009-06-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve