%0 Journal Article
%T Fore-vacuum plasma-assisted deposition of dielectric coatings and process characterization
%A Yushkov, Yu G
%A Burachevsky, Yu A
%A Tyunkov, A V
%A Zolotukhin, D B
%J Journal of Physics: Conference Series
%V 1145
%N 1
%P 6
%@ 1742-6596
%D 2019-01-01
%~ DeepDyve