%0 Journal Article
%T Angstrom-accuracy multilayer thickness determination using optical metrology and machine learning
%A Kwak, Hyunsoo
%A Ryu, Sungyoon
%A Cho, Suil
%A Kim, Junmo
%A Yang, Yusin
%A Kim, Jungwon
%J Proceedings of SPIE
%V 11782
%P 117820U-117820U-5
%@ 0277-786X
%D 2021-06-20
%I SPIE
%~ DeepDyve