%0 Journal Article
%T Capacitive micromachined ultrasonic transducers for transmitting and receiving ultrasound in air
%A Zhao, Yihe
%A Zhao, Libo
%A Li, Zhikang
%A Li, Jie
%A Yang, Ping
%A Xu, Tingzhong
%A Liu, Zichen
%A Guo, Shuaishuai
%A Wang, Jiuhong
%A Jiang, Zhuangde
%J Journal of Micromechanics and Microengineering
%V 29
%N 12
%P 15
%@ 0960-1317
%D 2019-12-01
%~ DeepDyve