%0 Journal Article
%T Wafer-level vapor cells filled with laser-actuated hermetic seals for integrated atomic devices
%A Maurice, Vincent
%A Carlé, Clément
%A Keshavarzi, Shervin
%A Chutani, Ravinder
%A Queste, Samuel
%A Gauthier-Manuel, Ludovic
%A Cote, Jean-Marc
%A Vicarini, Rémy
%A Abdel Hafiz, Moustafa
%A Boudot, Rodolphe
%A Passilly, Nicolas
%J Microsystems & Nanoengineering
%V 8
%N 1
%D 2022-12-14
%I Nature Publishing Group UK
%~ DeepDyve