%0 Journal Article
%T Fabrication Methods for Microscale 3D Structures on Silicon Carbide
%A Cho, Younghak
%A Hwang, Jihong
%A Park, Min-Soo
%A Kim, Bo Hyun
%J International Journal of Precision Engineering and Manufacturing
%V 23
%N 12
%P 1477-1502
%@ 2234-7593
%D 2022-12-01
%I Korean Society for Precision Engineering
%~ DeepDyve