%0 Journal Article
%T Comparison of binary mask defect printability analysis using virtual stepper system and aerial image microscope system
%A Phan, Khoi A.
%A Williams, Alvina M.
%A Strener, Steve
%A Li, Junling
%J Proceedings of SPIE
%V 3873
%N 1
%P 681-692
%@ 0277-786X
%D 1999-12-30
%I SPIE
%~ DeepDyve