%0 Journal Article
%T Low-power grating detection system chip for high-speed low-cost length and angle precision measurement
%A Hou, Ligang
%J Proceedings of SPIE
%V 6280
%N 1
%P 628004-628004-6
%@ 0277-786X
%D 2006-11-06
%I SPIE
%~ DeepDyve