%0 Journal Article
%T Pairing wafer leveling metrology from a lithographic apparatus with deep learning to enable cost effective dense wafer alignment metrology
%A Schmitt-Weaver, Emil
%A Bhattacharyya, Kaustuve
%J Proceedings of SPIE
%V 10961
%P 1096109-1096109-6
%@ 0277-786X
%D 2019-03-20
%I SPIE
%~ DeepDyve