%0 Journal Article %T Elimination of Abbe error method of large-scale laser comparator %A Li, Jianshuang %A Zhang, Manshan %A He, Mingzhao %A Miao, Dongjing %A Deng, Xiangrui %A Li, Lianfu %J Proceedings of SPIE %V 9446 %P 94463V-94463V-9 %@ 0277-786X %D 2015-02-27 %I SPIE %~ DeepDyve