%0 Journal Article
%T The formation of moulds for 3D microstructures using excimer laser ablation
%A Lawes, R. A.
%A Holmes, A. S.
%A Goodall, F. N.
%J Microsystem Technologies
%V 3
%N 1
%P 17-19
%@ 0946-7076
%D 1996-11-22
%I Springer-Verlag
%~ DeepDyve