%0 Journal Article %T Design, fabrication, and integration of micro/nano-scale photonic crystal devices and plasmonic devices for VLSI photonic integration application %A Lee, El-Hang %A Noh, H. S. %A Song, S. H. %A Lee, S. G. %J Proceedings of SPIE %V 6327 %N 1 %P 632705-632705-7 %@ 0277-786X %D 2006-08-31 %I SPIE %~ DeepDyve