%0 Journal Article
%T Design and analysis of deep ultraviolet microlithography illumination system
%A Han, Xing
%A Che, Zihui
%J Proceedings of SPIE
%V 7657
%N 1
%P 765715-765715-6
%@ 0277-786X
%D 2010-10-12
%I SPIE
%~ DeepDyve