%0 Journal Article
%T Characterization of a MEMS deformable mirror by far field intensity evaluation
%A Greiner, Cherry
%A Finn, Susanna
%A Choi, Stacey
%A Doble, Nathan
%J Proceedings of SPIE
%V 8617
%P 86170J-86170J-10
%@ 0277-786X
%D 2013-03-04
%I SPIE
%~ DeepDyve