%0 Journal Article
%T Copper interconnects for semiconductor devices
%A Merchant, Sailesh
%A Kang, Seung
%A Sanganeria, Mahesh
%A Schravendijk, Bart
%A Mountsier, Tom
%J JOM
%V 53
%N 6
%P 43-48
%@ 1047-4838
%D 2001-04-24
%I Springer-Verlag
%~ DeepDyve