%0 Journal Article
%T HV NMOS Transistor for IC/MEMS Integration on SOI
%A Jansson, Roope
%A Ronkainen, Hannu
%A Kiihamäki, Jyrki
%A Mellin, Joni
%J Physica Scripta
%V 2004
%N T114
%@ 0031-8949
%D 2004-01-01
%~ DeepDyve