%0 Journal Article
%T Three-axis microactuator for smart optical interconnect system
%A White, Edward V.
%A Haake, John M.
%J Proceedings of SPIE
%V 3328
%N 1
%P 353-364
%@ 0277-786X
%D 1998-07-20
%I SPIE
%~ DeepDyve