%0 Journal Article
%T In-situ monitoring of submicron polysilicon linewidths using diffraction gratings
%A Chapados, Jr., Phillip
%J Proceedings of SPIE
%V 1803
%N 1
%P 283-289
%@ 0277-786X
%D 1993-04-16
%I SPIE
%~ DeepDyve