%0 Journal Article
%T Low losses in an active silicon photonic multi-project wafer runs
%A Carpenter, Lewis G.
%A Begovic, Amir
%A Timalsina, Yukta
%A Antohe, Alin
%A Dikshit, Amit
%A Baiocco, Christopher
%A Leake, Gerald L.
%A Fahrenkopf, Nicholas M.
%A Harame, David L.
%J Proceedings of SPIE
%V 12006
%P 1200602-1200602-5
%@ 0277-786X
%D 2022-03-05
%I SPIE
%~ DeepDyve