%0 Journal Article
%T Comparison study between stepper (5x) and scanner (4x) for gate CD control using total process-proximity-based correction
%A Nam, Byung-Ho
%J Proceedings of SPIE
%V 4186
%N 1
%P 793-800
%@ 0277-786X
%D 2001-01-22
%I SPIE
%~ DeepDyve