%0 Journal Article
%T Design, simulation and analysis of a digital RF MEMS varactor using thick SU-8 polymer
%A Ramli, Noor
%A Arslan, Tughrul
%A Haridas, Nakul
%A Zhou, Wei
%J Microsystem Technologies
%V 24
%N 1
%P 473-482
%@ 0946-7076
%D 2017-03-21
%I Springer Berlin Heidelberg
%~ DeepDyve