%0 Journal Article
%T Pattern centric design based sensitive patterns and process monitor in manufacturing
%A Hsiang, Chingyun
%A Cheng, Guojie
%A Wu, Kechih
%J Proceedings of SPIE
%V 10145
%P 101451O-101451O-10
%@ 0277-786X
%D 2017-03-28
%I SPIE
%~ DeepDyve