%0 Journal Article
%T A fabrication process for the monolithic integration of magnetoelastic actuators and silicon sensors
%A Tang, Jun
%A Green, Scott R
%A Gianchandani, Yogesh B
%J Journal of Micromechanics and Microengineering
%V 25
%N 4
%P 9
%@ 0960-1317
%D 2015-04-01
%~ DeepDyve