%0 Journal Article
%T Formation of porosity in sputtered amorphous hydrogenated carbon films
%A Yin, Y.
%A Collins, R.
%A Zhang, Q.
%J Journal of Materials Science
%V 29
%N 22
%P 5794-5800
%@ 0022-2461
%D 2004-09-12
%I Kluwer Academic Publishers-Plenum Publishers
%~ DeepDyve