%0 Journal Article
%T P‐52: Morphological and Electrical Difference in C‐axis Aligned Crystalline IGZO Films Based on the Sputtering Method
%A Kawata, Takuya
%A Oota, Masashi
%A Ishihara, Noritaka
%A Nakashima, Motoki
%A Takasu, Takako
%A Kurosawa, Yoichi
%A Dairiki, Koji
%A Tsubuku, Masashi
%A Yamazaki, Shunpei
%J Sid Symposium Digest of Technical Papers
%V 47
%N 1
%P 1330-1332
%@ 0097-966X
%D 2016-05-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve