%0 Journal Article %T Comparison of different types of MMI-resonators fabricated on a micron-scale SOI platform %A Cherchi, Matteo %A Harjanne, Mikko %A Ylinen, Sami %A Kapulainen, Markku %A Vehmas, Tapani %A Aalto, Timo %J Proceedings of SPIE %V 9367 %P 936713-936713-9 %@ 0277-786X %D 2015-02-27 %I SPIE %~ DeepDyve