%0 Journal Article
%T 13.3: CaMgO(CMO) Film Properties Study
%A Xing, Fangli
%A Xue, Daoqi
%A Lu, Zhengxian
%A Luo, Xianghui
%A Ji, Nan
%A Yan, Qun
%J Sid Symposium Digest of Technical Papers
%V 43
%N 1
%@ 0097-966X
%D 2012-06-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve