%0 Journal Article
%T CMUTs with high-K atomic layer deposition dielectric material insulation layer
%A Xu, Toby
%A Tekes, Coskun
%A Degertekin, F.
%J IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control
%@ 0885-3010
%D 2014-12-01
%I Institute of Electrical and Electronics Engineers (IEEE)
%~ DeepDyve