%0 Journal Article
%T ALD of Metal Fluorides–Potential Applications and Current State
%A Atosuo, Elisa
%A Mäntymäki, Miia
%A Ritala, Mikko
%J Advanced Materials Interfaces
%V 12
%N 4
%D 2025-02-01
%I Wiley Subscription Services, Inc., A Wiley Company
%~ DeepDyve