%0 Journal Article %T A Process for Multilevel Copperpolyimide High Density Interconnect Structures, Flex Circuits and TAB Tape %A Volfson, D. %A Senturia, S.D. %J Circuit World %V 16 %N 3 %P 32-34 %@ 0305-6120 %D 1990-02-01 %I Emerald Group Publishing Limited %~ DeepDyve