%0 Journal Article
%T A Novel Shallow Trench Isolation with Mini-Spacer Technology
%A Yeh, Wen-Kuan
%A Lin, Tony
%A Chou, ComingChen
%A Sun, Shin-Wei
%J Japanese Journal of Applied Physics
%V 38
%N 4S
%@ 0021-4922
%D 1999-04-01
%~ DeepDyve