%0 Journal Article
%T A SF6 RF plasma reactor for research on textile treatment
%A Riccardi, C
%A Barni, R
%A Fontanesi, M
%A Massafra, M
%A Selli, E
%A Mazzone, G
%J Plasma Sources Science and Technology
%V 10
%N 1
%@ 0963-0252
%D 2001-02-01
%~ DeepDyve