%0 Journal Article
%T Digital lithography technology for advanced packaging manufacturing
%A Chunder, Anindarupa
%A Mora, Cindy
%A Bailey, Heather
%A Lee, Bruce
%A Yeh, Clay
%A Chuang, CC
%A Zhong, Qin
%A Khasgiwale, Niranjan
%A Chen, Jang Fung
%J Proceedings of SPIE
%V 13427
%P 134270I-134270I-12
%@ 0277-786X
%D 2025-04-23
%I SPIE
%~ DeepDyve