%0 Journal Article
%T The complexity of fill at 28nm and beyond
%A Rodriguez, Norma
%A Yang, Jie
%A Graupp, Bill
%A Wilson, Jeff
%A Anikin, Eugene
%J Proceedings of SPIE
%V 8327
%N 1
%P 83270Q-83270Q-6
%@ 0277-786X
%D 2012-02-15
%I SPIE
%~ DeepDyve