%0 Journal Article
%T Fabrication of surface micromachined molybdenum cantilever beams for PWM MEMS pressure sensor and issues that affect yield
%A Sivasundari, K.
%A Sugantharathnam, D.
%A Daniel, R.
%J Microsystem Technologies
%V 25
%N 7
%P 2535-2545
%@ 0946-7076
%D 2019-03-19
%I Springer Berlin Heidelberg
%~ DeepDyve