%0 Journal Article
%T Multichamber processor for small semiconductor laboratories - the first results
%A Punkkinen, R
%A Ihantola, H
%A Jokinen, K
%A Kuusela, T
%A Arvela, H
%A Hedman, H-P
%A Saikku, V
%J Physica Scripta
%V 1994
%N T54
%@ 0031-8949
%D 1994-01-01
%~ DeepDyve