%0 Journal Article
%T Metalorganic Chemical Vapor Deposition of Complex Metal Oxide Thin Films   by Liquid Source Chemical Vapor Deposition
%A Buskirk, Peter C. Van
%A Bilodeau, Steve M.
%A Jeffrey F. Roeder , Jeffrey F. Roeder
%A Peter S. Kirlin 
   , Peter S. Kirlin
%J Japanese Journal of Applied Physics
%V 35
%N 4S
%@ 0021-4922
%D 1996-04-01
%~ DeepDyve