%0 Journal Article
%T A novel surface polishing method and its fundamental performance in ultra-fine polishing of wafer
%A Cao, Jianguo
%A Li, Jianyong
%A Nie, Meng
%A Zhu, Pengzhe
%A Zhao, Chaoyue
%A Zhang, Jingjing
%A Xuan, Tong
%A Xu, Jinhuan
%A Li, Baozhen
%J The International Journal of Advanced Manufacturing Technology
%V 105
%N 8
%P 2919-2933
%@ 0268-3768
%D 2019-11-09
%I Springer London
%~ DeepDyve