%0 Journal Article
%T A Multifunctional Microwave Plasma Reaction Apparatus and its Applications
%A Xi-zhang, Wang
%A Qiang, Wu
%A Zheng, Hu
%A Hua, Xu
%A Shui, Miao
%A Yi, Chen
%J Plasma Science and Technology
%V 2
%N 4
%@ 1009-0630
%D 2000-08-01
%~ DeepDyve