%0 Journal Article %T Analog Spatial Light Modulators Based on Micromirror Arrays %A Dauderstädt, Ulrike %A Dürr, Peter %A Gehner, Andreas %A Wagner, Michael %A Schenk, Harald %J Micromachines %V 12 %N 5 %@ 2072-666X %D 2021-04-23 %I Multidisciplinary Digital Publishing Institute %~ DeepDyve