%0 Journal Article
%T The Research on the Fabrication of the Novel Basic Unit for 3D Structure Integrated Circuit
%A Liao, Yongbo
%A Li, Ping
%A Xu, Fenghe
%A Peng, Chenxi
%A Feng, Ke
%A Nie, Ruihong
%A Li, Yaosen
%A Xiong, Xuanlin
%A He, Tao
%A Xu, Lu
%A Liu, Yuting
%J Journal of Physics Conference Series
%V 2524
%N 1
%P 7
%@ 1742-6588
%D 2023-06-01
%I IOP Publishing
%~ DeepDyve