%0 Journal Article
%T Prediction of imaging performance of immersion lithography using high refractive index fluid
%A Sato, Takashi
%J Proceedings of SPIE
%V 6924
%N 1
%P 69242F-69242F-8
%@ 0277-786X
%D 2008-03-14
%I SPIE
%~ DeepDyve