%0 Journal Article %T Feasibility of Microelectronic Quartz Temperature and Pressure Sensors %A Poplavko, Yuri M. %A Pereverzeva, Larissa P. %A Cho, Nam-Ihn %A You, Young Soo %A Nam, Hyoung Gin %J Japanese Journal of Applied Physics %V 37 %N 7R %@ 0021-4922 %D 1998-07-01 %~ DeepDyve