%0 Journal Article
%T Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications
%A Xue, Gaopeng
%A Toda, Masaya
%A Li, Xinghui
%A Li, Bing
%A Ono, Takahito
%J Micromachines
%V 13
%N 8
%@ 2072-666X
%D 2022-08-11
%I Multidisciplinary Digital Publishing Institute
%~ DeepDyve