%0 Journal Article %T Uncertainty analysis of distortion measurement of laser differential confocal by different evaluation methods %A Yuan, Quan %A Yang, Yi %A Zhang, Lin %A Shi, Zhendong %A Ma, Hua %A Ren, Huan %J Proceedings of SPIE %V 10457 %P 104570L-104570L-6 %@ 0277-786X %D 2017-10-24 %I SPIE %~ DeepDyve