%0 Journal Article %T Recent progress in nano-optomechanical devices at microwave frequencies %A Yu, Zejie %A Zhou, Wen %A Tsang, Hon Ki %A Sun, Xiankai %J Proceedings of SPIE %V 10536 %P 105361F-105361F-12 %@ 0277-786X %D 2018-02-22 %I SPIE %~ DeepDyve