%0 Journal Article
%T High volume semiconductor manufacturing using nanoimprint lithography
%A Hamaya, Zenichi
%A Seki, Junichi
%A Asano, Toshiya
%A Sakai, Keita
%A Aghili, Ali
%A Mizuno, Makoto
%A Choi, Jin
%A Jones, Chris
%J Proceedings of SPIE
%V 10810
%P 108100F-108100F-12
%@ 0277-786X
%D 2018-10-03
%I SPIE
%~ DeepDyve